Precision in the Mechanical Removal Processing of a Nanosheet by AFM Probe

Precision in the Mechanical Removal Processing of a Nanosheet by AFM Probe

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This paper presents nano mechanical removal processing of a potassium niobate nanosheet with an atomic force microscope (AFM).In particular, we examined the control processing method for the direction of the nanosheet surface in order to attain Calf Head a high precision groove machining of a bilayer nanosheet.As a result, by the machining direction taking into account machining anisotropy and the machining load W that balance machining accuracy and machining stability, a machined groove with a maximum width of 28nm and a very sharp heart rate re edge of a bilayer nanosheet was attained.